A 150W Nd-YAG pulsed laser source was used for high precision laser cutting of metal foils. Though the high energy density but limited heat input the use of the laser as cutting tool became obvious. For sensoring applications a 38µm stainless steel foil was cut using an average laser power of 10W, pulse duration 0.1ms and a frequency of 250Hz. Using these parameters, a processing speed of 100mm per minute could be applied.